Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1998.06a
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- Pages.53-53
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- 1998
Effect of Ion beam Potential on Structural and Electrical Propperties of $In_2O_3$ film in Reactive Ion-Assisted Depposition
- Cho, Jun-Sik-Cho (Thin Film Technology Research Center, Korea Institute of Science and Technology, Cheongryang) ;
- Yoon, Ki-Hyun-Yoon (Department of Ceramics Engineering, Yonsei University) ;
- Choi, Won-Kook-Choi (Thin Film Technology Research Center, Korea Institute of Science and Technology, Cheongryang) ;
- Jung, Hyung-Jin-Jung (Thin Film Technology Research Center, Korea Institute of Science and Technology, Cheongryang) ;
- Kondranin, Serguei-Kondranin (Plasma Tech Co., Ltd) ;
- Koh, Seok-Keun (Thin Film Technology Research Center, Korea Institute of Science and Technology, Cheongryang)
- Published : 1998.06.01
Abstract
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