Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

A study on the surface change of MgO by discharge in AC PDP

방전시간에 따른 MgO 표면층의 변화에 관한 연구

  • Ji, S.W. (Dept. of Electrical Eng. Pusan National University) ;
  • Yeo, J.Y. (Dept. of Electrical Eng. Pusan National University) ;
  • Kim, D.H. (Dept. of Electrical Eng. Pusan National University) ;
  • Park, C.H. (Dept. of Electrical Eng. Pusan National University) ;
  • Cho, J.S. (Dept. of Electrical Eng. Pusan National University)
  • Published : 1998.07.20
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Abstract

One of the most important problems in the development of AC PDP is to make long life and more stable panels. It is well known that the life time of a panel strongly depends on the sputtering-resistant property of the protecting layer such as MgO. However, the sputtering rate is so low that it is very difficult to measure the sputtering-resistant property of MgO. This paper describes a high speed measurement technique to test the sputtering-resistant property of MgO thin film by the R.F. magnetron sputtering. In this case the MgO sample has been used as a target of sputtering process. Moreover, the MgO surface changed by ion-bombarding sputtering are also discussed with SEM photoes.

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