PSD를 이용한 MMAD의 동작특성 측정에 관한 연구

Measurements of Dynamic Response of Micro-Mirror using Position Sensitive Detector

Measurement equipment, which consists of He-Ne laser, objective lens, CCD camera and position sensitive detector, was developed for the dynamic response of micromirror. This equipment can measure the tilting direction and angle, the rise time and frequency response of micromirror to the input signal. It was found that the rise time of the micromirror was less than 10${\mu}m$ and the resonant frequency was about 25kHz.