대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1998년도 하계학술대회 논문집 G
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- Pages.2521-2523
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- 1998
MEMS용 구조물을 위한 알루미늄 박막의 잔류응력에 대한 연구
A study for the residual strain of aluminum thin film for MEMS structures
- Kim, Youn-Jin (School of Electrical Engineering, Seoul National University) ;
- Shin, Jong-Woo (School of Electrical Engineering, Seoul National University) ;
- Kim, Yong-Kweon (School of Electrical Engineering, Seoul National University)
- 발행 : 1998.07.20
초록
Freestanding flexible microstructures fabricated from deposited thin films become mechanically unstable when internal stresses exceed critical values. The residual stress and stress gradient of aluminum thin film were examined to make sure of fabricating the reproduceable aluminium structure. For good shape of micro mirror array and microstructures, the experiment was done varying thickness and deposition rate. As the aluminium film thickness increased from 0.8
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