Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1998.07g
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- Pages.2515-2517
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- 1998
Design and Fabrication of Movable Micro-Fersnel Lens on XY-stage
XY-Stage에 의해 정적인 변위를 갖는 미세 프레넬 렌즈(Micro-Fresnel Lens)의 설계 및 제작
- Kim, Che-Heung (School of Electrical Engineering, Seoul National University) ;
- Ahn, Si-Hong (School of Electrical Engineering, Seoul National University) ;
- Lim, Hyung-Taek (School of Electrical Engineering, Seoul National University) ;
- Kim, Yong-Kweon (School of Electrical Engineering, Seoul National University)
- Published : 1998.07.20
Abstract
The micro fresnel lens(MFL) was modeled and fabricated on a XY-stage electrostatically driven by comb actuator. The modeled MFL was approximated as a step shape with 4-phase and 4-zone plate. The focal length and diameter of the MFL is 20mm and 912