Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Studies on Formation of Piezoelectric Film for Sensor and its Characteristic Estimation

센서용 piezoelectric film의 형성 및 특성 평가에 대한 연구

  • Lee, Sung-Jun (Dept. of Electrical Engineering, The University of Seoul) ;
  • Kim, Chul-Ju (Dept. of Electrical Engineering, The University of Seoul)
  • 이성준 (서울시립대학교 전자.전기 공학부 반도체 재료 및 소자 연구실) ;
  • 김철주 (서울시립대학교 전자.전기 공학부 반도체 재료 및 소자 연구실)
  • Published : 1998.07.20
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Abstract

In this study, we formed the piezoelectric film and estimated its characteristics for sensor application. The $Pb(Zr,Ti)O_3(PZT)$ was chosen as piezoelectric material and we used Sol-Gel method to form film. To increase film thickness, the multiple coatings were performed, and the good characteristics obtained in thick film compared to thin film. Because PZT film showed fine etching property as well as other good characteristics, it was thought that it was appropriate material for sensor fabrication.

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