Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1997.11a
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- Pages.314-316
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- 1997
Phosphorus doping effect on $Si_{0.8}Ge_{0.2}$ epitaxial growth by LPCVD
저압 CVD에 의한 $Si_{0.8}Ge_{0.2}$ epitaxial growth에 대한 Phosphorus doping 효과
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Lee, Cheal-Jin
(Department of Electrical Engineering, Kunsan National University) ;
- Eom, Moon-Jong (Department of Electrical Engineering, Kunsan National University) ;
- Sung, Man-Young (Department of Electrical Engineering, Korea University)
- Published : 1997.11.29
Abstract
We have studied the epitaxial growth and electrical properties of
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