Photocharge voltage measurements of solids

고체의 광전하전압 측정

The photocharge voltage technique is based on the measurement of a small electrical potential difference which appears on any solid body when subject to illumunation by a modulated laser light beam. This voltage is proportional to the induced change in the surface electrical charge and is nondestructively measured on various materials such as conductors, semicinductors and dielectrics. In this paper, photocharge voltage on conductors, semiconductors and dielectrics are measured nondestructively using a capacitative coupling. The test structures and the validity of this system to characterize the surface properties for soled materials are shown.