Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Developpment of 3-Dimensional MC Ion Implantation Simulator

  • Son, Myung-Sik (Semiconductor Process and Device Laboratory Deppt. of Electronics Engineering, Chung-Ang University) ;
  • Hwang, Ho-Jung (Semiconductor process and Device Laboratory Deppt. of Electronics Engineering, Chung-Ang University)
  • Published : 1997.02.01
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