Low Temperature Growth of GaN on Sapphire by Remote Plasma Enhanced Metalorganic Chemical Vapor Deposition

  • Kim, Min-Hong (School of Materials Science and Engineering, Seoul National University) ;
  • Sone, Cheolsoo (School of Materials Science and Engineering, Seoul National University) ;
  • Kim, Hyun-Jin (School of Materials Science and Engineering, Seoul National University) ;
  • Yoon, Eui-joon (School of Materials Science and Engineering, Seoul National University)
  • 발행 : 1997.06.01