한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 1996년도 추계학술대회 논문집
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- Pages.219-224
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- 1996
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- 2005-8446(pISSN)
피에조일렉트릭 액츄에이터의 히스테리시스 보상 제어
Hysteresis Compensation Control of Piezoelectric Actuators
초록
Piezoelectric actuators exhibit limited accuracy in tracking control due to their hysteresis nonlinearity. In this study a digital tracking control approach for a piezoelectric actuator based on incorporating a feedback linearization loop with a PID feedback controller is presented. The hysteresis nonlinearity of the piezoelectric actuator is modeled in the feedback compensation loop using the Maxwell slip model. Experiments were performed on a piezoelectric 2-axis linear positioner for tracking linearly decaying sinusoidal waveforms and circles. The experimental results show that the tracking control performance is noticeably improved by augmenting the feedback loop with a model of hysteresis in the feedback compensation loop.
키워드