The Growth of Tin Oxide Thin Films by Reactive Ion-Assisted Beam and Applications for Gas Sensors

  • Choi, Won-Kook (Division of Ceramics, Korea Institute of Science and Technology) ;
  • Cho, Jun-Sik (Division of Ceramics, Korea Institute of Science and Technology) ;
  • Jung, Hyung-Jin (Division of Ceramics, Korea Institute of Science and Technology) ;
  • Koh, Seok-Keun (Division of Ceramics, Korea Institute of Science and Technology)
  • Published : 1996.06.01