Fabrication and evaluation of a silicon pendulous servo accelerometer

실리콘 펜듈럼 서보 가속도계의 제작 및 성능 평가

This paper presents the initial results of development of a inertial navigation grade silicon pendulous accelerometer. This effort focused on developing a bulk-micromachined silicon pendulum and designing a PI-servo controller. Performance data presented in this paper includes threshold, bias short term stability and nonlinearity of scale factor. This accelerometer developed is demonstrated the feasibility of meeting one-nautical-mile-per-hour accuracy.