대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
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표준마이크로머시닝 프로젝트

Standardized Micromachining Project(SMP)

  • Cho, Dong-Il (Seoul National University, School of Electrical Engineering)
  • 발행 : 1996.07.22
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초록

This paper describes a standardized micromachinung project (SMP) performed at Seoul National University (SNU). The SNU SMP uses a 3-mask, 2-polysilicon surface micromaching process. The entire process is performed at SNU Inter-University Semiconductor Research Institute(ISRC). In this first SNU SMP attemp, 16 $1cm^2$ cells containing different designs were fabricated.

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