대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

마이크로머시닝 기술을 이용한 초소형 자이로센서의 연구동향

Miniaturized gyroscopes using micromachining technology

  • 한승오 (고려대학교 전기공학과) ;
  • 박정호 (고려대학교 전기공학과)
  • Han, S.O. (Dept. of Electrical Engineering, Korea University) ;
  • Pak, J.H. (Dept. of Electrical Engineering, Korea University)
  • 발행 : 1996.07.22
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

In this paper various types of gyroscope fabricated by micromachining technologies were reviewed. Four common types of gyroscope reported in the past few years are beam, tuning fork, gimbal, and vibrating shell structure made by surface micromachining using sacrificial layer, bulk micromachining using RIE, or electroplating method. In the study of these new gyroscopes, the fabrication methods, advantages and disadvantages of each structure were examined as well as the direction of development in the future.

키워드