대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1995년도 추계학술대회 논문집 학회본부
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- Pages.606-608
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- 1995
열구동형 마이크로 릴레이 구조체 제작
Fabrication of a thermally actuated micro-relay
- 최부연 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
- 박경호 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
- 이용일 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
- 이재열 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
- 이종현 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
- 유형준 (한국전자통신연구소, 반도체연구단 미세구조연구실)
- Choi, B.Y. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
- Park, K.H. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
- Lee, Y.I. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
- Lee, J.Y. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
- Lee, J.H. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
- Yoo, H.J. (Semiconductor Division, Electronics and Telecommunications Research Institute)
- 발행 : 1995.11.18
초록
A thermally actuated micro-relay using a mercury-contact has been designed and fabricated. The mercury actuation was achieved by external nitrogen pressure and the mercury-contact was moved by actuation pressure of 110torr in the 100
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