대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

HF 증기상 식각과 열처리를 이용한 다결정 규소 미세 구조체의 제작

Fabrication of Polysilicon Microstructures Using Vapor-phase HF Etching and Annealing Techniques

  • 박경호 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 이춘수 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 정영이 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 이재열 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 이용일 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 최부연 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 이종현 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 유형준 (한국전자통신연구소, 반도체연구단 미세구조연구실)
  • Park, K.H. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Lee, C.S. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Jung, Y.I. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Lee, J.Y. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Lee, Y.I. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Choi, B.Y. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Lee, J.H. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Yoo, H.J. (Semiconductor Division, Electronics and Telecommunications Research Institute)
  • 발행 : 1995.11.18
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초록

We present a novel method. to fabricate surface micromachined structures without their sticking on the substrate. An anhydrous HF/$CH_3OH$ vapor-phase etching (VPE) of sacrificial $SiO_2$ layers was employed to release 0.5-2 {\mu}m$ thick polysilicon cantilevers. The fabricated structures were observed using scanning electron microscope and 3-dimensional optical microscope. The results show that we can successfully make cantilever beams up to 1200{\mu}m$ long without sticking. Annealing effects on residual stress of polysilicon microstructures were also investigated. Anneal ins at 1100$^{\circ}C$ for 1 hour was found to be effective to release the residual stress of the polysilicon microstructures. These VPE and anneal ins techniques will be useful in surface micromachining technologies.

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