대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1995년도 추계학술대회 논문집 학회본부
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- Pages.459-461
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- 1995
오메가트론을 이용한 ECR 수소 플라프마 내의 이온 검출
Detection of Ions in ECR $H_2$ Plasma Using Omegatron Mass Spectrometer
- Park, Jung-Woo (Dept. of Electrical Engineering, Seoul National University) ;
- Jeong, Heui-Seob (Dept. of Electrical Engineering, Seoul National University) ;
- Kim, Gon-Ho (Dept. of Physics, Han Yang University) ;
- Whang, Ki-Woong (Dept. of Electrical Engineering, Seoul National University)
- 발행 : 1995.11.18
초록
An omegatron mass spectrometer was designed and fabricated. Experiments have been performed to demonstrate the instrument's operation in the ECR plasma device. By using this analyzer, mass spectra have been obtained in hydrogen plasmas, and typical results are presented. In the plasma omegatron, downstreaming plasma generated by ECR are entering the analyzer through a smsll floating aperture. We employ a biasing technique to reduce the ion velocity along the magnetic field and to keep the ions from drifting to the side pintos, and thus achieved improved ion collection and sensitivity. Mass spectra obtained show that main positive ion components are
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