Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1995.11a
- /
- Pages.89-89
- /
- 1995
Solid Phase Crystallization of Multi-Layered Amorphous Silicon Films Grown by LPCVD
LPCVD법으로 증착된 다층비정질 실리콘박막의 고상결정화
Abstract
Keywords