Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Electrical properties of ZnO/sapphire piezo-electric transducer by RF magnetron sputtering

RF magnetron sputtering으로 제작한 ZnO/sapphire 압전 변환기의 전기적인 특성에 관한 연구

  • 이종덕 (성균관대학교 공과대학 전기공학과) ;
  • 정규원 (성균관대학교 공과대학 전기공학과) ;
  • 고상춘 (성균관대학교 공과대학 전기공학과) ;
  • 송준태 (성균관대학교 공과대학 전기공학과)
  • Published : 1995.05.01
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Abstract

In this paper, the physical characteristics of piezoelectric transducer which generates acoustic weve at microwave frequency were theoretically analized. We found that increasing electrode thickness is showed large distorthion on bandwidth. ZnO thin film were desposited by RF magnetron sputtering method. considering the sputtering parameters. Thickness of the desposited ZnO was 3.9 $\mu\textrm{m}$. In this experiment, we get that resistivity is 12.196${\times}$109 [cm$\Omega$], that resonance frequency is 827.47MHz Measuring insertion loss, we ascertained to possibility of transducer application for microwave frequency.

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