한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1995년도 제9회 학술발표회 논문개요집
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- Pages.28-29
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- 1995
반응성 RF Magnetron Sputtering법으로 제조된 AIN박막의 증착 변수들이 굴절율에 미치는 영향
The Effect of Deposition Parameters on Refractive Index of AIN Thin Films Fabricated by Reactive RF Magnetron Sputtering
- Nam, Chang-Gil (Engineering College, University of Ulsan) ;
- Choe, Seung-U (Engineering College, University of Ulsan) ;
- Jo, Dong-Yul (Engineering College, University of Ulsan) ;
- Cheon, Hui-Gon (Engineering College, University of Ulsan)
- 발행 : 1995.06.01