Proceedings of the Korean Operations and Management Science Society Conference (한국경영과학회:학술대회논문집)
- 1995.04a
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- Pages.750-750
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- 1995
Batching and input regulation in the photolithography process for memory chips fabrication
메모리칩 제조 포토공정의 뱃칭과 투입정책
- Shin, Yong-Ho (Dept. of Industrial Engineering, KAIST) ;
- Lee, Tae-Eog (Dept. of Industrial Engineering, KAIST) ;
- Lee, Young-Doo (Dept. of Industrial Engineering, KAIST)
- Published : 1995.04.01
Abstract
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