대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
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Fabrication and analysis of the dielectric particle separator

  • Yang, Sung-Dong (Department of Electrical Engineering, Seoul National Univ.) ;
  • Lee, Sang-Wook (Department of Electrical Engineering, Seoul National Univ.) ;
  • Kim, Yong-Kweon (Department of Electrical Engineering, Seoul National Univ.)
  • 발행 : 1994.11.18
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초록

A manipulator which can separate dielectric particles (biological cells) was fabricated on a silicon wafer using polyimide and n-type electroplating. It consists of 1024 electrode arrays ($60{\mu}m{\times}60{\mu}m$) and spacing insulator. Positive dielectrophoresis is used for attracting particles. We have the solution of 3-D laplace equation about this device and calculate the force acting on the particles. The solution has spatial periodicity in the x, y directions and decays exponentially in the z direction.

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