대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1994년도 추계학술대회 논문집 학회본부
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- Pages.422-424
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- 1994
정전력을 이용한 마이크로 그리퍼의 설계 및 제작
Design and Fabrication of Micro Gripper Using Electrostatic Force
- Ahn, Dong-Sup (Department of Electrical Engineering, Seoul National University) ;
- Kim, Yong-Kweon (Department of Electrical Engineering, Seoul National University)
- 발행 : 1994.11.18
초록
A comb drive electrostatic micro gripper was designed and fabricated. We designed it analytically using electrostatic force and cantilever deflection equation. In fabrication, we used LIGA-like technology consisted of Ni electroplating through polyimide patterned by
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