대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

3극 마그네트론 스퍼트링 화학 기상 증착법에 의한 도전성 다이아몬드성 탄소 박막의 합성

Synthesis of Conducting Diamond-Like Carbon Films by TRIODE Magnetron Sputtering-Chemical Vapor Deposition

  • Lee, Jong-Yul (Dept. of Electrical Engineering, Seoul National University) ;
  • Tae, Heung-Sik (Dept. of Electrical Engineering, Seoul National University) ;
  • Pyo, Jae-Hwack (Dept. of Electrical Engineering, Seoul National University) ;
  • Whang, Ki-Woong (Dept. of Electrical Engineering, Seoul National University)
  • 발행 : 1994.11.18
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초록

We synthesized the conducting diamond-like carbon films using plasma-enhanced chemical vapor deposition and analysized its characteristics. We obtained the metal-containing diamond-like carbon films using $CH_4$, Ar gas and aluminum target. We observed the changes of electrical conductivity, microhardness and surface morphology according to $Ar/CH_4$ ratio, substrate bias and target bias. As the target bias and $Ar/CH_4$ ratio increase and the substrate bias decreases, the electrical conductivity and surface roughness increase. The increase of hardness involves decrease of the electrical conductivity. Metal-containing amorphous hydrogenated carbon films show improved adhesion on metal substrates compared to pure diamond-like carbon films and better electrical conductivity.

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