대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1994년도 추계학술대회 논문집 학회본부
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- Pages.240-242
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- 1994
$Si_{1-x}Ge_x$ 박막의 Spectroscopic ellisometry 분석
Characterization of $Si_{1-x}Ge_x$ alloy by Spectroscopic ellisometry
- Eo, Yoon-Pil (Department of Electrical Engineering, Seoul National University) ;
- Hwang, Seok-Hee (Department of Electrical Engineering, Seoul National University) ;
- Tae, Heung-Sik (Department of Electrical Engineering, Seoul National University) ;
- Whang, Ki-Woong (Department of Electrical Engineering, Seoul National University)
- 발행 : 1994.11.18
초록
Spectroscopic ellipsometry(SE) was employed to characterize the Si/
키워드