Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1994.05a
- /
- Pages.165-166
- /
- 1994
The Analysis of N Component in Thin Oxide Film Thermally Grown by $NH_3$ Oxidation
- Kim, Young-Cho- (Dept. of Electronic Engineering, Seoul City Univ.) ;
- Kim, Chul-Ju- (Dept. of Electronic Engineering, Seoul City Univ.)
- Published : 1994.05.01
Abstract
The depth profiles of the as-grown and the annealed NH
Keywords