한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1994년도 제7회 학술발표회 및 한·일 CVD 심포지움 논문개요집
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- Pages.77-78
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- 1994
The Role of Surface Hydride and Fluoride in Low-Tempperature Si CVD (Application of in-situ FTIR Technique)
- Chung, Chan-Hwa (Dept. of Chemical Engineering, Seoul Nat`l University) ;
- Moon, Sang-Heup (Dept. of Chemical Engineering, Seoul Nat`l University)
- 발행 : 1994.06.01