Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1994.07b
- /
- Pages.1391-1393
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- 1994
Thermal Flow Sensor Using Silicon Microbridges
실리콘 마이크로브리지를 이용한 유량센서
- Yang, Joon-Young (Korea University) ;
-
Min, Nam-Ki
(Korea University)
;
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Min, Suk-Ki
(KIST)
- Published : 1994.07.21
Abstract
A silicon microbridge flow sensor has been developed. The heat transfer within silicon microbridge is modeled to predict the characteristics of the sensor. The flow sensor shows high sensitivity at small flow rate. This device is simple to fabricate, using standard IC and micromachining technology.
Keywords