Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1994.07b
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- Pages.1388-1390
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- 1994
An Integrated Humidity Sensor Based on Thin Polyimide Films
폴리이미드 박막을 이용한 집적화 습도센서
- An, Kwang-Ho (Korea University) ;
- Min, Nam-Ki (Korea University)
- Published : 1994.07.21
Abstract
A polyimide-based capacitive humidity sensor has been designed and fabricated using silicon integrated-circuit technology, and its performance measured. The sensor showed excellent linearity, low temperature coefficient, and low hysteresis over a wide range of relative humidity and temperature. The signal conditioning circuits for detecting relative humidity and converting it to voltage have been developed based on a charge redistribution between capacitors using switched -capacitors.
Keywords