Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1994.07b
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- Pages.1236-1238
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- 1994
Preparation of Precision Thin Film Resistor Sputtered by Magnetron Sputtering
IC용 초정밀 박막저항소자의 제조와 특성연구
- Ha, H.J. (Dep. of Electrical Engineering Pusan National University) ;
- Jang, D.J. (Dep. of Electrical Engineering Pusan National University) ;
- Moon, S.R. (Dep. of Electrical Engineering Pusan National University) ;
- Park, C.S. (KEPCO) ;
- Cho, J.S. (Dep. of Electrical Engineering Pusan National University) ;
- Park, C.H. (Dep. of Electrical Engineering Pusan National University)
- 하흥주 (부산대학교 공과대학 전기공학과) ;
- 장두진 (부산대학교 공과대학 전기공학과) ;
- 문상용 (부산대학교 공과대학 전기공학과) ;
- 박차수 (한국전력공사) ;
- 조정수 (부산대학교 공과대학 전기공학과) ;
- 박정후 (부산대학교 공과대학 전기공학과)
- Published : 1994.07.21
Abstract
TiAlN thin films were prepared by a multi target r.f magnetron sputtering system under different conditions. We have investigated the resistivity and T.C.R. (Temperature Coefficient of Resistance) characteristics of TiAlN films deposited on
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