Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1994.07b
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- Pages.1233-1235
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- 1994
A Study on The Development of Humidity Sensor Using Polyimide Film
폴리이미드 박막을 이용한 습도 센서의 개발에 관한 연구
- Jeong, K.H. (Chungnam Univ.) ;
- Cho, D.H. (Chungnam Univ.) ;
- Lee, B.S. (Chungnam Univ.) ;
- Jeong, B.K. (Chungnam Univ.) ;
- Han, S.O. (Chungnam Univ.) ;
- Kim, Y.L. (Chungnam Univ.) ;
- Park, K.S. (Chungnam Jun. Col.) ;
- Kim, J.S. (Taejon Inst, Univ.)
- 정광희 (충남대학교) ;
- 조동헌 (충남대학교) ;
- 이병성 (충남대학교) ;
- 정병기 (충남대학교) ;
- 한상옥 (충남대학교) ;
- 김용락 (충남대학교) ;
- 박강식 (충남전문대학) ;
- 김종석 (대전산업대학교)
- Published : 1994.07.21
Abstract
In this work, polyimide thin films fabricated by the electrophoretic deposition are investigated as a humidity sensing material. Capacitance and impedance are measured with increasing relative humidity to find the nature of the film. From the results, the polyimide humidity sensor is not classified impedance change type but capacitance change type and appear more sensitive in the region of higher humidity than that of lower humidity.
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