대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1993년도 정기총회 및 추계학술대회 논문집 학회본부
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- Pages.210-212
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- 1993
붕소 식각 정지층을 이용한 두 개의 한 방향 실리콘 미세 밸브의 제작
Fabrication of Two One-Way Silicon Micro Valves using Boron Etch Stop Layer
- Seo, Jeong-Deok (Dept. of Control and Instrumentation Engr., Ajou University) ;
- Yang, Eui-Hyeok (Dept. of Control and Instrumentation Engr., Ajou University) ;
- Yang, Sang-Sik (Dept. of Control and Instrumentation Engr., Ajou University)
- 발행 : 1993.11.26
초록
In this paper, a silicon microvalve has been fabricated using micromachining technology. The valve consists of the several thin silicon diaphragms which are designed to open and close depending on the pressure difference. It is supposed to pass fluids in only one direction. The thin diaphragms are fabricated by boron etch stop using an anisotropic etchant, EPW. The fabricated valve has been tested for various pneumatic pressure. According to the experimental results, the slit width of the valve increases as the pneumatic pressure increases.
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