대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1993년도 정기총회 및 추계학술대회 논문집 학회본부
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- Pages.207-209
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- 1993
주름진 박막을 전극으로 한 정전형 미세 구동기의 제작
Fabrication of an Electrostatic Micro Actuator Using a Corrugated Diaphragm As an Electrode
- Kim, Sung-Yoon (Dept. of Control and Instrumentation Engineering, Ajou University) ;
- Yang, Eui-Hyeok (Dept. of Control and Instrumentation Engineering, Ajou University) ;
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Yang, Sang-Sik
(Dept. of Control and Instrumentation Engineering, Ajou University)
- 발행 : 1993.11.26
초록
In this paper, an electrostatic silicon micro actuator has been designed and fabricated using the micro machining technology. The actuator consists of two counter electrodes. One is an Al film deposited on a pyrex glass, and the other is a circular corrugated diaphragm with boron doped. The diaphragm is fabricated by boron etch stop technique using an anisotropic etchant, EPW.
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