Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1993.11a
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- Pages.115.1-115
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- 1993
A study on Coating of AIN and Synthesis of AluMinum Nitride Materal from Chemical vapor deposition
CVD 반응으로 부터 질화 알루미늄 및 AIN기판 코팅 연구
Abstract
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