Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1993.07b
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- Pages.1289-1291
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- 1993
Analysis of hydrogenation effects on Low temperature Poly-Si Thin Film Transistor
저온에서 제작된 다결정 실리콘 박막 트랜지스터의 수소화 효과에 대한 분석
- Choi, K.Y. (Dept. of Electrical Eng., Seoul National Univ.) ;
- Kim, Y.S. (Dept. of Electrical Eng., Seoul National Univ.) ;
- Lee, S.K. (Dept. of Electrical Eng., Seoul National Univ.) ;
- Lee, M.C. (Dept. of Electrical Eng., Seoul National Univ.) ;
- Han, M.K. (Dept. of Electrical Eng., Seoul National Univ.)
- Published : 1993.07.18
Abstract
The hydrogenation effects on characteristics of polycrystalline silicon thin film transistors(poly-Si TFT's) of which the channel length varies from
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