Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1993.07b
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- Pages.1268-1270
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- 1993
A Study on the Characteristics of Si-$SiO_2$ interface in Short channel SONOSFET Nonvolatile Memories
Short channel SONOSFET 비휘발성 기억소자의 Si-$SiO_2$ 계면특성에 관한 연구
- Kim, Hwa-Mok (Dept. of Elctronic Materials Engineering, Kwangwoon Univ.) ;
- Yi, Sang-Bae (Dept. of Elctronic Materials Engineering, Kwangwoon Univ.) ;
- Seo, Kwang-Yell (Dept. of Elctronic Materials Engineering, Kwangwoon Univ.) ;
- Kang, Chang-Su (Dept. of Electronics, Yuhan College)
- Published : 1993.07.18
Abstract
In this study, the characteristics of Si-
Keywords