Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1992.05a
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- Pages.71-71
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- 1992
Cross-sectional TEM Specimens Preparation of Precisely Selected Regions of Semiconductor Devices Using Focused Ion Beam Milling
이온빔 접속장치에 의한 특정영역에서의 TEM 시편 제작방법
Abstract
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