Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1992.05b
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- Pages.66-66
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- 1992
The Effect of Si Substrate on the Agglomeration Behavior or TiSi2 Thin Film
TiSi2 박막의 Agglomration 거동에 미치는 Si기판 의존성
Abstract
Keywords