한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1992년도 춘계학술대회 논문집
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- Pages.86-90
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- 1992
Twin-well 구조로 제작된 N채널 및 P채널 FET의 특성
Characteristics of N-and P-Channel FETs Fabricated with Twin-Well Structure
초록
We have studied the characteristics of n-and p-channel FETs with submicron channel length fabricated by twin-well process. Threshold voltage variation and potential distribution with channel ion implantation conditions and impurity profile of n-and p-channel region wee simulated using SUPREM-II and MINIMOS 4.0 simulater, P-channel FET had buried-channel in the depth of 0.15
키워드