대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1992년도 하계학술대회 논문집 B
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- Pages.900-902
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- 1992
표면 처리용 자화 Plasma 형성에 관한 연구
A Study on The Development of Magnetoplasma For Surface Treatment
- Son, I.Y. (Pusan National University) ;
- Jang, D.J. (Pusan National University) ;
- Kim, S.T. (Pusan National University) ;
- Kwak, Y.S. (Pusan National University) ;
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Cho, J.S.
(Pusan National University)
;
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Park, C.H.
(Pusan National University)
- 발행 : 1992.07.23
초록
In order to develope the uniform Plasma source which is able to make polymer or glass surface modification, the d.c glow discharge characteristics for the hemisphere -cylindrical electrode system with external d.c magnetic field are investigated. Single probe method has been used for detecting plasma parameters. We make uniform plasma generated to the external of electrode between hemisphere and cylindrical electrode. The surface treatment of metal and insulate has been performed by this uniform plasma.
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