Fabrication of Y-cut LiNbO$_3$ Mach-Zehnder Interferometric Modulator using Proton Diffusion Process

양자확산 공정을 이용한 Y-cut LiNbO$_3$ 마하젠더 간섭계형 변조기 제작

A guided-wave electrooptic Mach-Zehnder interferometric modulator was fabricated on Y-cut acoustic grade LiNbO3 process. In order to reduce the electrode capacitance, serial capacitance electrode(SCE) structure was adopted. Extinction ratio more than 30dB was obtained with V$\pi$ of 4.69 volt at λ= 0.6328${\mu}{\textrm}{m}$. Frequency response was measured by using the swept frequency technique, and the bandwidth of the modulator was about 1GHz.