대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1991년도 하계학술대회 논문집
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- Pages.233-237
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- 1991
플라즈마를 이용한 유기 실리콘 박막의 합성과 그 특성에 관한 연구
A study on the formation and properties of silicone thin film by the plasma polymerization.
초록
In the study, samples were made on the electrode in internal glass bell jar by the radio frequency discharge polymerization. The polymerization rate of samples was observed as a function of r.f. discharge power. The characteristics of polymers obtained from TMDSO and HMDSO were analyzed by FT-IR and TGA, and their electrical properties were examined on insulation resistivity, breakdown voltage, dielectric constant, and tan
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