Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1990.10a
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- Pages.105-107
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- 1990
The Influence of $CO_2$ Gas in Plasma Polymerized thin films
$CO_2$ 케리어 가스가 플라즈마 종합막에 미치는 영향
Abstract
In this study, we prepared plasma polymerized thin films as changing the composition rate of the Ar/CO
Keywords