한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

내전극 정전 결합형 플라즈마 중합 장치에 의한 유기 박막의 작성

A preparation of organic thin films by capacitive coupled plasma polymerization method

  • 발행 : 1990.10.01

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초록

In this study, we fabricated Plasma polymerized styrene thin films which used a new capacitive type apparatus. RE Power supply (13.56 MHz) was used and styrene monomer was adopted. After the preparation of thin films the molecular structure of Plasma polymerized styrene films was analyzed by some analyses as IR, FT-IR, Gas chromatography and so on.

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