Construction of Laser Lithography System using Method of Monitoring the Focal Point

초점 모니터 방법을 이용한 레이져 Lithography 장치의 제작과 응용

This paper represents the construction of laser beam writing system, laser lithography, using new method that guarantees convenience and accuracy in laser focusing. The X, Y translation stage using DC motors was controlled by the computer. Minimum line width of 1.6${\mu}{\textrm}{m}$ was obtained by the laser lithography system.