Surface Topography by Using Digital Tolansky Interferometer

Digital Tolansky 간섭계의 개발과 이를 활용한 Surface Topography

Digital Tolansky interferometer which is Tolansky interferometer interfaced to the computer through CCD TV-camera, is developed and applied to the surface topography. First, resolution of this system is determined by minimum measurable thickness of thin film. Theoretical analysis and experimenatal results are compared. Second, surface topographic picture of thin is obtained by two orthogonal fringes. Using linear fitting method, height distribution of specimen is obtained and 3-dim. picture is plotted.