한국광학회:학술대회논문집 (Proceedings of the Optical Society of Korea Conference)
- 한국광학회 1989년도 제4회 파동 및 레이저 학술발표회 4th Conference on Waves and lasers 논문집 - 한국광학회
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- Pages.210-213
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- 1989
GaAs계 OMVPE 및 Laser CVD System 연구
Studies of OMPVE and LACVD for GaAs semiconductors
초록
An early phase of the OMVPE and LACVD studies of growing AlGaAs/GaAs films is reported. The AlGaAs/GaAs epitaxy to the level of obtaining MOW structures is a crucial step for the fabrication of the devices such as SEED and/or DOES which are basic parts of the OEIC. The analysis of the OMVPE system is shown for this purpose and the basic results of the LACVD are also presented.
키워드