RTA system design modeling to reduce slip

Slip 현상을 줄이기위한 RTA(고속열처리) 장치 설계모델링

  • 장현룡 (중앙대학교 전자공학과) ;
  • 한승윤 (중앙대학교 전자공학과) ;
  • 황호정 (중앙대학교 전자공학과)
  • Published : 1988.07.01

Abstract

In this paper optimal light source arraies are calculated to reduce slips in RTA process. A two-channel temperature controller is constructed on a board using IBM - XT to improve the temperature uniformity. The proposed RTA structure has also advantage of power dissipation.

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