대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1988년도 전기.전자공학 학술대회 논문집
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- Pages.332-334
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- 1988
방사가열원이 Si의 흡수효과와 OSF 성장에 미치는 영향
Influence of Radiation Heating Sources on the Absorption Effect and Growth of OSF in Si
- Hong, Soon-Kwan (Dept. of Electronics, Seoul Univ.) ;
- Kim, Chul-Ju (Dept. of Electronics, Seoul Univ.) ;
- Lee, Chul-Seung (Kyung Hee Univ.) ;
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Chung, Kwan-Soo
(Kyung Hee Univ.)
- 발행 : 1988.07.01
초록
Influence of incoherent lamp heating sources on the absorption effect and variation of OSF' size were investigated. The absorption effect on I.R lamp caused by free carrier excitation is greater than that of Tungsten-Halogen lamp. The variation of DSF' size weakly affected by oxidation time.
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